Year	2014
Authors	Shao-Kang Hung /Hung-Ruei Lin; Shao-Kang Hung; Chiao-Hua Cheng
Paper Title	Design and analysis of a 2-DOF planar nano-positioner with low parasitic rotation
Conference Name	Manipulation, Manufacturing and Measurement on the Nanoscale （3M-NANO）
Peroid	Oct. 27-31, 2014
Date of Publication	2014-10-31
Language	English