NYCU ME| Year | 2000 |
|---|---|
| Authors | Tsung-Lin Chen /T. Chen and R. Horowitz |
| Paper Title | "Design and Fabrication of PZT-Actuated Silicon Suspensions," |
| Conference Name | IEEE Mechatronics |
| Location | Atlanta, Georgia |
| Peroid | Sep. 06-08, 2000 |
Login NCTU ME
| Year | 2000 |
|---|---|
| Authors | Tsung-Lin Chen /T. Chen and R. Horowitz |
| Paper Title | "Design and Fabrication of PZT-Actuated Silicon Suspensions," |
| Conference Name | IEEE Mechatronics |
| Location | Atlanta, Georgia |
| Peroid | Sep. 06-08, 2000 |