Year | 2016 |
---|---|
Authors | Shao-Kang Hung ,Shao-Kang Hunga, Kung-Hsuan Linb, Cheng-Lung Chena, Chen-Hsun Choua, You-Chuan Lina |
Author Type | First Author |
Paper Title | Total-internal-reflection-based photomask for large-area photolithography |
Journal Title | Optics & Laser Technology |
Vol.No | 79 |
Page(s) | 39-44 |
Date of Publication | 2016-07-01 |
Language | English |