Year 2016
Authors Shao-Kang Hung ,Shao-Kang Hunga, Kung-Hsuan Linb, Cheng-Lung Chena, Chen-Hsun Choua, You-Chuan Lina
Author Type First Author
Paper Title Total-internal-reflection-based photomask for large-area photolithography
Journal Title Optics & Laser Technology
Vol.No 79
Page(s) 39-44
Date of Publication 2016-07-01
Language English