Year	2014
Authors	An-Chen Lee /An-Chen Lee
Paper Title	Robustness Analysis of Mixed Product Run-to-Run Control for Semiconductor Process based on ODOB Control Structure
Journal Title	IEEE Transaction on Semiconductor Manufacturing
Vol.No	27
Issue.No	2
Page(s)	212-222
Level Type	SCI
Date of Publication	2014-05-01
ISSN(ISBN)	0894-6507
Language	English
Reference URL	http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6727439