NYCU ME| Year | 2010 |
|---|---|
| Authors | Tzong-Shi Liu ,Pan, S. P. and Liu, Tzong-Shi |
| Paper Title | Precision Measurement of Sub 50 nm Linewidth by Stitching Double-tilt Images |
| Journal Title | Japanese Journal of Applied Physics |
| Vol.No | Vol. 49 |
| Issue.No | No.6 |
| Language | English |
Login NYCU ME
