Year	2011
Authors	An-Chen Lee ,An-Chen Lee*, Tzu-Wei Kuo and Zeng-Lien Lee
Author Type	First Author,Corresponding Author
Paper Title	Modified Double EWMA Approach for Mixed Product Run-to-Run CMP Process Control
Journal Title	Advanced Materials Research
Vol.No	314-316
Page(s)	2504-2511
Level Type	EI
Date of Publication	2011-08-01
Language	English