Year	2001
Authors	Yeng-Yung Tsui ,Y. Y. Tsui, C. P. Kung and H. P. Cheng
Paper Title	Modelingof the Slip Flow in the Spiral Grooves of a MolecularPump
Journal Title	J. Vac. Sci. Technol. A
Vol.No	Vol. 19
Issue.No	No.6,
Page(s)	2785-2790
Language	English