NYCU ME| Year | 2001 |
|---|---|
| Authors | Yeng-Yung Tsui ,Y. Y. Tsui, C. P. Kung and H. P. Cheng |
| Paper Title | Modelingof the Slip Flow in the Spiral Grooves of a MolecularPump |
| Journal Title | J. Vac. Sci. Technol. A |
| Vol.No | Vol. 19 |
| Issue.No | No.6, |
| Page(s) | 2785-2790 |
| Language | English |
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