Year	2017
Authors	Yao-Hsien Liu ,Liu, Y.H., Peng, G.J., Lai, W.C., Huang, C.Y., Liang, J.H.
Author Type	First Author,Corresponding Author
Paper Title	Flow Field Investigation in a Rotating Disk Chemical Vapor Deposition Chamber with a Perforated Showerhead
Journal Title	Experimental Thermal and Fluid Science
Vol.No	88
Page(s)	389-399
Level Type	SCI
Date of Publication	2017-11-01
Language	English