Year 2017
Authors Yao-Hsien Liu ,Liu, Y.H., Peng, G.J., Lai, W.C., Huang, C.Y., Liang, J.H.
Author Type First Author,Corresponding Author
Paper Title Flow Field Investigation in a Rotating Disk Chemical Vapor Deposition Chamber with a Perforated Showerhead
Journal Title Experimental Thermal and Fluid Science
Vol.No 88
Page(s) 389-399
Level Type SCI
Date of Publication 2017-11-01
Language English