Year	2011
Authors	Tsung-Lin Chen /C. -Y. Tsai and T. - L. Chen
Paper Title	Design, fabrication, and calibration of a novel MEMS logic gate
Journal Title	J. Micromech. Microeng
Vol.No	Vol. 20
Issue.No	No. 9
Page(s)	095021-
Date of Publication	2011-01-01
Language	Chinese