NYCU ME| Year | 2015 |
|---|---|
| Authors | Shao-Kang Hung ,Shao-Kang Hung, Chiao-Hua Cheng, Cheng-Lung Chen |
| Paper Title | Automatic-Patterned Sapphire Substrate Nanometrology Using Atomic Force Microscope |
| Journal Title | IEEE TRANSACTIONS ON NANOTECHNOLOGY |
| Vol.No | 14 |
| Issue.No | 2 |
| Date of Publication | 2015-03-01 |
| Language | English |
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