Year	2015
Authors	Shao-Kang Hung ,Shao-Kang Hung, Chiao-Hua Cheng, Cheng-Lung Chen
Paper Title	Automatic-Patterned Sapphire Substrate Nanometrology Using Atomic Force Microscope
Journal Title	IEEE TRANSACTIONS ON NANOTECHNOLOGY
Vol.No	14
Issue.No	2
Date of Publication	2015-03-01
Language	English