Year	2011
Authors	Tien-Kan (TK) Chung ,Feng Zhang, Ya-Chuan Perng, Ju H. Choi, Tao Wu, Tien-Kan Chung, Gregory P. Carman, Christopher Locke, Sylvia Thomas, Stephen E. Saddow, and Jane P. Chang*
Paper Title	Atomic layer deposition of Pb(Zr,Ti)Ox on 4H-SiC for metal-ferroelectric-insulator-semiconductor diodes
Journal Title	Journal of Applied Physics (RF: 59/148=39.9%, Physics, Applied, IF: 2.068)
Vol.No	109
Issue.No	12
Page(s)	124109-
Level Type	SCI
Date of Publication	2011-06-23
Language	English
Reference URL	http://aip.scitation.org/doi/full/10.1063/1.3596574