Year	2008
Authors	An-Chen Lee ,Chien-Feng Wu, Chih-Ming Hung, Juhn-Horng Chen , An-Chen Lee
Paper Title	Advanced Process Control of the Critical Dimension in Photolithography
Journal Title	Int. J. of Precision Engineering and Manufacturing
Vol.No	9
Issue.No	1
Page(s)	12-18
Level Type	SCI
Date of Publication	2008-01-01
Language	English