Year | 2005 |
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Authors | Ray-Quan Hsu ,K. L. Ou,S.Y. Shiou,Ray-Quen Hsu |
Paper Title | "Barrier capability of Hf-N Films with Various Nitrogen Concentrations Against Copper Diffusion in Cu/Hf-N/n + -p Junction Diodes" |
Journal Title | Journal of The Electrochemical Society |
Vol.No | Vol.152(2) |
Page(s) | 1-6 |
Language | Chinese |