Year 2005
Authors Ray-Quan Hsu ,K. L. Ou,S.Y. Shiou,Ray-Quen Hsu
Paper Title "Barrier capability of Hf-N Films with Various Nitrogen Concentrations Against Copper Diffusion in Cu/Hf-N/n + -p Junction Diodes"
Journal Title Journal of The Electrochemical Society
Vol.No Vol.152(2)
Page(s) 1-6
Language Chinese