Year	2005
Authors	Ray-Quan Hsu ,Keng-Liang Ou, Ray-Quan Hsu
Paper Title	“Comparative study of polycrystalline Ti, amorphous Ti and multi-amorphous Ti as a barrier film for Cu interconnect”
Journal Title	Journal of Vacuum Science and Technology B(accepted)
Vol.No	vol.30
Page(s)	229-235
Language	Chinese