Patent Title	Method of manufacturing a MEMS device
Patent Number	8763220
Patent Country	USA
Publish Date	2014/07/20
Year	2014
Authors	Tien-Kan Chung, Chung-Hsien Lin, Yao-Te Huang, Chia-Hua Chu, Chia-Ming Hung, Wen-Chuan Tai, Chang-Yi Yang Go back
Language	English