Year	2014
Project Category	Research Projects
Project Title	The study of compensative structures assisted convex and concave structure high-aspect-ratio etching for mirco-grating application by Inductively Coupled Plasma-Reactive Ion Etch (ICP-RIE)
Participator	Wensyang Hsu
Job Title	Principle investigator
Period	2014.08 ~ 2015.07
Unit	Ministry of science and technology
Language	Chinese