Year | 2009 |
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Authors | Jong-Shinn Wu ,Hadley M. Cave, Chin-Wai Lim, Mark C. Jermy, Jong-Shinn Wu*, Matthew R. Smith and Susan P. Krumdieck |
Paper Title | CVD flow field modelling using the Quiet Direct Simulation (QDS) method |
Conference Name | The 17th European CVD Conference |