Year	2011
Authors	Shao-Kang Hung /Jun-Wei Wu; Mei-Yung Chen; Shao-Kang Hung
Paper Title	A compact tapping mode AFM with sliding mode controller for precision image scanning
Conference Name	Control Conference （ASCC）
Peroid	May. 15-18, 2011
Date of Publication	2011-05-18
Language	English