NYCU ME| Year | 2003 |
|---|---|
| Authors | Tsing-Fa Lin ,T. F. Lin, T. C. Cheng, J. C. Hsieh, and M. J. Dai |
| Paper Title | "Design of Heating Assembly Unit for RTCVD Reactor System for 12-inch Single Silicon Wafer" |
Login NYCU ME
| Year | 2003 |
|---|---|
| Authors | Tsing-Fa Lin ,T. F. Lin, T. C. Cheng, J. C. Hsieh, and M. J. Dai |
| Paper Title | "Design of Heating Assembly Unit for RTCVD Reactor System for 12-inch Single Silicon Wafer" |
