Year | 2005 |
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Authors | Shao-Kang Hung ,Kuang-Yuh Huang, En-Te Hwu, Hsin-Yi Chow, and Shao-Kan Hung |
Paper Title | “Optical Pickup System for Measuring the Displacement of the Micro Cantilever in Scanning Probe Microscope,” |
Conference Name | Proceedings of International Conference on Mechatronics (EI), |