Year | 2007 |
---|---|
Authors | Shao-Kang Hung ,En-Te Hwu, Shao-Kang Hung, Chih-Wen Yang, Kuang-Yuh Huang, and Ing-Shouh Hwang |
Paper Title | “Simultaneous Detection of Translational and Angular Displacements of Micromachined Elements,” |
Journal Title | Applied Physics Letters |
Vol.No | Vol. 91 |
Page(s) | 221908- |
Level Type | SCI |
Language | English |